Design and basic dimensions of high-vacuum counter flanges of ion pumps

Toothed high-vacuum flanges 25,32, 40 OST 11 868.007 (counter flanges to NMD vacuum pumps (I)-0,0063 FO, NMD (I)-0,016 FO)

Toothed high-vacuum flanges 25,32, 40 OST 11 868.007
Toothed counter flanges OST 11 868.007
Dimensions, mm
Dn
D
D1
D2
D3
D4
D5
D6
а, °
d
n
Pump
 
 
 
 
 
 
 
 
 
 
 
 
25
85
62
30
80
35
30 ± 0,14
65
90
11
4
NMD (I)-0,0063 FO
32
92
70
36
86
45
40 ± 0,17
72
90
11
4
 
40
110
80
45
105
50
45 ± 0,17
90
45
13
8
NMD (I)-0,016 FO

Toothed high-vacuum flanges 100, 160 OST 11 868.007 (counter flanges to NMD vacuum pumps (I)-0,025 FO, NMD (I)-0,063 FO, NMD (I) (I) (OI)-0,1 FO, NMD (I)-0,16 FO, NMD (I) (O)-0,25 FO, NMD (I)-0,4 FO)

Toothed high-vacuum flanges 100, 160 OST 11 868.007
Toothed counter flanges according to OST 11 868.007
Dimensions, mm
Dn
D
D1
D2
D3
D4
D5
D6
H
H1
d
n
Pump
 
 
 
 
 
 
 
 
 
 
 
 
 
100
200
148
108
190
130
125 ± 0,13
180
16
18
14
12
NMD (I)-0,025 FO, NMD (I)-0,063 FO, NMD (I)-0,1 FO, NMD (OI)-0,1 FO, NMD (I)-0,16 FO
160
280
215
168
270
195
190 ± 0,15
250
19
21
16
16
NMD (I)-0,25 FO, NMD (O)-0,25 FO, NMD (I)-0,4 FO

Toothed high-vacuum flanges 250 OST 11 868.007 (counter flange to NMD pumps (I)-0,63 FO, NMD (I)-1 FO)

Toothed high-vacuum flanges 250 OST 11 868.007

High-vacuum motionless flanges with plain mounting holes Dn-(40, 100, 160, 250) GOST 26526 (counter flanges to NMD pumps (I)-0,016 FG, NMD (I)-0,025 FG, NMD (I)-0,063 FG, NMD (I)-0,1 FG, NMD (I)-0,16 FG, NMD (I) (O)-0,25 FG, NMD (I)-0,4 FG, NMD (I)-0,63 FG, NMD (I)-1 FG

High-vacuum motionless flanges with plain mounting holes Dn-(40, 100, 160, 250) GOST 26526
Counter flanges GOST 26526
Dimensions, mm
Dn
D
D0
D1
D2
D3
D4
H
H1
d
d1
n
a
Pump
 
 
 
 
 
 
 
 
 
 
 
 
 
 
40
35
58.7
41.8
48.3
70
38.5
13
18
M6
6,6
6
60°
NMD (I)-0,016 FG
100
100.4
130.2
115.2
120.7
152
104.5
21
26
M8
8,4
16
22,5°
NMD (I)-0,025FG, NMD (I)-0,063FG, NMD (I)-0,1 FG, NMD (I)-0,16 FG
160
150
181
166
171.5
202
160.6
23
27
20
18°
NMD (I)-0,25 FG, NMDO-0,25 FG, NMD (I)-0,4 FG
250
250
284
267.5
273
305
256
25
30
32
11,25°
NMD (I)-0,63 FG, NMD (I)-1 FG