Diode ion pumps NMD-0,0063 and NMDI-0,0063

Diode ion vacuum pumps NMD-0,0063 are used for oil-free extraction of gases and gas mixtures (air) from vacuum systems and for creation of high and ultrahigh vacuum. Ion pumps NMD-0,0063 are used as a part of vacuum processing equipment.

Diode ion vacuum pumps NMD-0,0063 are not intended for extraction of inert gases and continuous extraction of hydrogen (inert gases and hydrogen could be pumped only as impurities in chemically active gases with atomic weight higher than 14). Their capacity is reduced if they are used to pump hydrocarbons. Inert gases can be pumped by diode ion vacuum pumps NMDI-0,0063.

Diode ion pumps NMD-0,0063 and NMDI-0,0063

The pumps are supplied in a moderately cold climate modification category 4 according to GOST 15150. Ion vacuum pump NMD-0,0063 is powered by a special power supply unit (further – BPM), not included in the delivery package of the pump.

Diode ion pumps NMD-0,0063 is manufactured only in one modification of the connecting flange according to OST 11 868.007 (FO).

Example of identification code that can be used to order ion pump NMD-0,0063:
- a pump with Dn-25 connecting flange to the pump body according to OST 11 868.007, without a power supply unit for the pump: " NMD-0,0063 pump TU-3648-002-42186869-2003, FO-25, without BPM"

NOTE: Power supply units (BPM) for ion vacuum pumps are delivered by a separate order, together with the pump or separately. Key features of NMD-0,0063 and NMDI-0,0063 vacuum pumps are shown in the table below. Design and basic dimensions of counter flanges of ion vacuum pumps are shown in the Appendix. Basic specifications of BPM power units recommended for our pumps are shown in with General specifications of ion vacuum pumps.

Specifications of NMD-0,0063 and NMDI-0,0063 diode ion vacuum pumps

Parameter
NMD-0,0063
NMDI-0,0063
     
Maximum speed, l/sec (± 20 %)
- with nitrogen
6
5
- with argon
-
1
Maximum starting pressure, Pa
1
1
Maximum working pressure, Pa
2,0*10-3
2,0*10-3
Ultimate residual pressure, Pa
4,0*10-7
4,0*10-7
Recommended power supply unit
BPM-0,025
BPM-0,025
Weight (+5 %), kg
3,55
3,55
Connecting flange of the pump body according to OST 11 868.007 (FO)
- Dn, mm
25
25
- Pump dimensions (+5 max), mm
85 х 85 х 160
85 х 85 х 160

Our company Prizma LLC can design and manufacture other vacuum equipment similar to the available equipment, but with different parameters according to the customer’s specifications.