Turbomolecular vacuum pumps NVT-100
Turbomolecular vacuum pumps NVT-100 are used for gases and gas mixtures (air) extraction from vacuum systems (with the exception of hydrocarbons, aggressive gases, vapors that affect construction materials of the pumps) and for creation of high and ultrahigh vacuum.
- surface physics and gas analysis, manufacturing of electronic devices;
- leak detection, manufacture of semiconductors;
- creation of oil-free forevacuum for electrophysical extraction devices – ion, evaporation (getter) and cryogenic pumps, combined (getter-ion) pumps, exhaust carts, units etc.
The pumps are supplied in a moderately cold climate modification category 4 according to GOST 15150. Turbomolecular NVT-100 pumps require a forevacuum system for operation. Turbomolecular vacuum pumps are powered by special power supply units (further – BPT), not included in the delivery package of the pump.
NOTE: Power supply units BPT for turbomolecular the pumps are supplied by a separate order, together with the pump or separately. Key features of the pumps are shown in the table below. Design and basic dimensions of counter flanges of our turbomolecular pumps are shown in the Appendix. Basic specifications of BPT power supply units recommended for our pumps are shown in General specifications of turbomolecular vacuum pumps.
Specifications of turbomolecular vacuum pumps NVT-100
Parameter |
NVT-100 FR |
NVT-100 FO |
NVT-100 FG |
Pump speed with air (without inlet protection screen) in the pressure range 1*10-2 - 1*10-4 Па, ± 20 %, not less than l/sec |
100 |
100 |
100 |
Ultimate residual pressure of the pump (at discharge pressure not more than 6 Pa), Pa |
1*10-5 |
1*10-6 |
1*10-6 |
Acceleration time, minutes |
7 |
7 |
7 |
Rotation speed, sec-1 |
466±5 |
466±5 |
466±5 |
General levels of vibroacelecration measured in the horizontal plane of the pump inlet flange, in the established mode, not more than, dB |
90 |
90 |
90 |
Cooling |
air-cooled |
air-cooled |
air-cooled |
Grease |
consistent |
consistent |
consistent |
Maximum temperature of the pump inlet flange preheating, °С |
45 |
45 |
45 |
Counter outlet (high vacuum) flange of the pump, mm |
Mounting flange 100 RD 11 868.006 |
Toothed flange 100 OST 11 868.007 |
Flange Dn-100 GOST 26525 |
Counter outlet (forevacuum) flange of the pump, mm |
Flange 16 OST 11 868.005 |
Flange 16 OST 11 868.005 |
Flange 16 OST 11 868.005 |
Pump dimensions, not more than, mm* |
180 х 180 х 200 |
200 х 200 х 210 |
152 х 152 х 215 |
Weight, not more than, kg* |
6 |
9 |
8 |
Recommended power supply unit |
BPT-100 |
BPT-100 |
BPT-100 |
Maximum BPT power consumption, not more than, V*A |
100 |
100 |
100 |
Recommended forevacuum pump |
3NVR-1D, 2NVR-5DM |
3NVR-1D, 2NVR-5DM |
3NVR-1D, 2NVR-5DM |
Our company Prizma LLC can design and manufacture other vacuum equipment similar to the available equipment, but with different parameters according to the customer’s specifications.