Design and basic dimensions of high-vacuum counter flanges of turbomolecular pumps
Mounting high-vacuum flanges 63, 100, 160, 250 according to RD 11 868.006-80 (OST 11 868.007-74) (counter flanges to turbomolecular vacuum pumps NVT-100 FR, NVT-450 FR, NVT-1000 FR, 01AB-1500-004 FR)
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Dn |
D |
D1 |
D2 |
D3 |
D4 |
H |
H1 |
h |
h1 |
r |
Pump |
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63 |
95 |
70 |
66 |
92 |
90 |
12 |
14 |
2,5 |
5 |
1,5 |
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100 |
130 |
110 |
103 |
127 |
125 |
NVT-100 FR |
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160 |
180 |
170 |
- |
175 |
175 |
- |
2,5 |
NVT-450 FR |
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250 |
290 |
260 |
255 |
285 |
285 |
4,5 |
NVT-1000 FR |
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Toothed mounting high-vacuum flanges 100, 160 according to OST 11 868.007-74 (counter flanges to NVT-100 FO, NVT-450 FO pumps)
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Dn, H12 |
D |
D1 |
D2, h12 |
D3 |
D4, f9 |
D5 |
D6 |
H |
H1 |
d |
n |
Pump |
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100 |
200 |
148 |
108 |
190 |
130 |
125± 0,13 |
180 |
16 |
18 |
14 |
12 |
NVT-100 FO |
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160 |
280 |
215 |
168 |
270 |
195 |
190± 0,15 |
250 |
19 |
21 |
16 |
16 |
NVT-450 FO |
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Toothed mounting high-vacuum flanges 250 according to OST 11 868.007-74 (counter flanges to FO NVT-1000 pumps)
High-vacuum motionless flanges for plain mounting holes Dn- (63, 100, 160,250) GOST 26526 (counter flanges to FG NVT-100, NVT-450 FG, NVT-1000 FG pumps)
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Dn |
D, H11 |
D0 |
D1± 0,1 |
D2, H9 |
D3, h11 |
D4, H11 |
H, h11 |
H1, h11 |
d |
d1, H13 |
n |
a |
Pump |
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63 |
62 |
92,1 |
77 |
82,6 |
114 |
66 |
18 |
23 |
M8 |
8,4 |
8 |
45° |
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100 |
100,4 |
130,2 |
115,2 |
120,7 |
152 |
104,5 |
21 |
26 |
16 |
22,5° |
NVT-100 FR |
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160 |
150 |
181 |
166 |
171,5 |
202 |
160,6 |
23 |
27 |
20 |
18° |
NVT-450 FR |
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250 |
250 |
284 |
267,5 |
273 |
305 |
256 |
25 |
30 |
32 |
11,25° |
NVT-1000 FR |
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Design and basic dimensions of forevacuum counter flanges of turbomolecular vacuum pumps
Forevacuum flanges 16, 25, 40 OST 11 868.005 (forevacuum counter flanges to NVT-100, NVT-450, NVT-1000 pumps)
Dimensions, mm |
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Dn |
D |
D1 |
D2 |
Pump |
16 |
30 |
20 |
18,2 |
NVT-100 |
25 |
40 |
30 |
27,2 |
- |
40 |
55 |
45 |
22,2 |
NVT-450, NVT-1000
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