General specifications of turbomolecular vacuum pumps
Extract from specifications TU-3648-003-42186869-2008
Turbomolecular vacuum pumps are used for extraction of gases and gas mixtures (air) from vacuum systems (with the exception of hydrocarbons, aggressive gases, vapors that may affect construction materials of the pump) and for creation of high and ultrahigh vacuum.
Application of turbomolecular vacuum pumps:
- mass-spectrometry, accelerators of elementary particles, electronic microscopy, nuclear research;
- surface physics and gas analysis, manufacturing of electronic devices;
- leak detection, semiconductors production;
- creation of oil-free forevacuum vacuum for electrophysical extraction devices –ion, evaporation (getter) and cryogenic pumps, combined (getter-ion) pumps, exhaust carts, units etc.
- surface physics and gas analysis, manufacturing of electronic devices;
- leak detection, semiconductors production;
- creation of oil-free forevacuum vacuum for electrophysical extraction devices –ion, evaporation (getter) and cryogenic pumps, combined (getter-ion) pumps, exhaust carts, units etc.
The pumps are supplied in a moderately cold climate modification category 4 according to GOST 15150. Turbomolecular pumps require a forevacuum system for their operation. Turbomolecular pumps are powered by special power supply units (further – BPT), not included in the delivery package. by a separate order.
Example of identification code that can be used to order a turbomolecular vacuum pump:
- a pump with the speed of 100 l/sec with an inlet connecting flange to the pump body according to RD 11 868.006: " NVT-100-FR pump TU 3648-003-42186869-2008";
- a pump with speed of 400 l/sec with an inlet connecting flange to the pump body according to OST 11 868.007: " NVT-450-FO pump TU 3648-003-42186869-2008";
- a pump with speed of 1,000 l/sec with an inlet connecting flange to the pump body according to GOST 26526: " NVT-1000-FG Pump TU 3648-003-42186869-2008".
Key parameters of turbomolecular vacuum pumps
Parameter |
NVT-100 FR |
NVT-100 FO |
NVT-100 FG |
NVT-450 FR |
NVT-450 FO |
NVT-450 FG |
Pump speeds with air (without the inlet protection screen) over the pressure range 1*10-2 - 1*10-4 Pa, ± 20 %, not less than l/sec |
100 |
100 |
100 |
400 |
400 |
400 |
Ultimate residual pressure of the pump (at discharge pressure not more than 6 Pa), Pa |
1*10-5 |
1*10-6 |
1*10-6 |
1*10-5 |
6,5*10-6 |
6,5*10-6 |
Acceleration time, minutes |
7 |
7 |
7 |
10 |
10 |
10 |
Rotational speed, sec-1 |
466±5 |
466±5 |
466±5 |
410±8 |
410±8 |
410±8 |
General levels of vibroacceleration measured in the horizontal plane of the pump inlet flange, in the established mode, not more than, dB |
90 |
90 |
90 |
90 |
90 |
90 |
Cooling |
air-cooled |
air-cooled |
air-cooled |
water-cooled |
cwater-cooled |
water-cooled |
Grease |
consistent |
consistent |
consistent |
consistent |
consistent |
consistent |
Maximum temperature of the pump inlet flange preheating, °С |
45 |
45 |
45 |
45 |
45 |
45 |
Counter output (high-vacuum) flange of the pump, mm |
Mounting flange 100 RD 11 868.006 |
Toothed flange 100 OST 11 868.007 |
Flange Dn-100 GOST 26525 |
Mounting flange 160 RD 11 868.006 |
Toothed flange 160 OST 11 868.007 |
Flange Dn-160 GOST 26526 |
Counter output (forevacuum) flange of the pump, mm |
Flange 16 OST 11 868.005 |
Flange 16 OST 11 868.005 |
Flange 16 OST 11 868.005 |
Flange 40 OST 11.868.005 |
Flange 40 OST 11.868.005 |
Flange 40 OST 11.868.005 |
Pump dimensions, not more, mm* |
180х180х 200 |
200х200х 210 |
152х152х 215 |
250х260х 300 |
280х280х 290 |
250х260х 280 |
Weight, not more than, kg* |
6 |
9 |
8 |
22 |
28 |
27 |
Recommended power supply unit |
BPT-100 |
BPT-100 |
BPT-100 |
BPT-1000 |
BPT-1000 |
BPT-1000 |
Maximum BPT power consumption, not more than, V*A |
100 |
100 |
100 |
500 |
500 |
500 |
Recommend forevacuum pump |
3NVR-1D, 2NVR-5DM |
3NVR-1D, 2NVR-5DM |
3NVR-1D, 2NVR-5DM |
2NVR-5DM |
2NVR-5DM |
2NVR-5DM |
Parameter |
NVT-1000 FR |
NVT-1000 FO |
NVT-1000 FG |
Pump speeds with air (without the inlet protection screen) over the pressure range 1*10-2 - 1*10-4 Pa, ± 20 %, not less than l/sec |
1000 |
1000 |
1000 |
Ultimate residual pressure of the pump (at discharge pressure not more than 6 Pa), Pa |
1*10-5 |
1*10-6 |
1*10-6 |
Acceleration time, minutes |
15 |
15 |
15 |
Rotational speed, sec-1 |
360±8 |
360±8 |
360±8 |
General levels of vibroacceleration measured in the horizontal plane of the pump inlet flange, in the established mode, not more than, dB |
90 |
90 |
90 |
Cooling |
water-cooled |
water-cooled |
water-cooled |
Grease |
consistent |
consistent |
consistent |
Maximum temperature of the pump inlet flange preheating, °С |
45 |
45 |
45 |
Counter output (high-vacuum) flange of the pump, mm |
Mounting flange 250 RD 11 868.006 |
Toothed flange 250 OST 11 868.007 |
Flange Dn-250 of GOST 26526 |
Counter output (forevacuum) flange of the pump, mm |
Flange 40 OST 11 868.005 |
Flange 40 OST 11 868.005 |
Flange 40 OST 11 868.005 |
Pump dimensions, not more, mm* |
330х330х280 |
410х410х280 |
310х310х300 |
Weight, not more than, kg* |
30 |
39 |
40 |
Recommended power supply unit |
BPT-1000 |
BPT-1000 |
BPT-1000 |
Maximum BPT power consumption, not more than, V*A |
500 |
500 |
500 |
Recommend forevacuum pump |
2NVR-5DM |
2NVR-5DM |
2NVR-5DM |
* dimensions and weight without shipping plugs
Pump manufacture’s guarantees
The manufacturer guarantees trouble-free operation of turbomolecular vacuum pumps subject to compliance with the requirements to transportation, installation, storage and maintenance of the equipment. Warranty period is 12 months from the date of commissioning, but no more than 18 months from the date of the pump shipment to the user.
Power supply units for NVT turbomolecular vacuum pumps
Parameter of the power supply unit |
Pump type |
|||
NVT-100 |
NVT-450 |
NVT-1000 |
||
| Output voltage with active load | Voltage, V |
3х(25±2)
|
3х(42±2)
|
3х(42±2)
|
Frequency, Hz |
466±5
|
410±8
|
360±8
|
|
Output phase current with active load in continuous operation mode, not more than, A |
1,5 |
4,5 |
4,5 |
|
Starting phase current with active load, not more than, A |
6,5 |
7 |
8 |
|
Phase sequence |
Right-handed (A, B, C) |
Right-handed (A, B, C) |
Right-handed (A, B, C) |
|
BPT connection to the pump through a connector |
Socket RP-10-11 “3” GE0.364.004 TU |
Socket RP-10-7 “3” GE0.364.004 TU |
Socket RP-10-7 “3” GE0.364.004 TU |
|
List of the pump control circuits: A B C External protection External protection |
Connector 1B 3B 5B 2A 4A |
Connector 1B 3B 5B 2A 4A |
Connector 1B 3B 5B 2A 4A |
|
Alarm and control system |
BPT controls the pump operation and gives alarm signals::
- about the pump activation; - about the pump operation mode: START or MODE; - about the pump protection (overload protection, thermal protection) |
|||
Recommended BPT type |
BPT-100 KVLN 435.221.002
|
BPT-1000 KVLN 435.221.001
|
BPT-1000 KVLN 435.221.001
|
|
BPT power consumption, not more than, V*A
|
100 |
500 |
500 |
|