Getter-ion exhaust carts PVIG-100/160-9-018
Getter-ion exhaust carts PVIG-100/160-9-018 are used for oil-free extraction of gases and gas mixtures (air) from vacuum systems and for creation of high and ultrahigh vacuum. Getter-ion exhaust carts PVIG-100/160-9-018 are used as a part of vacuum processing equipment.
Operation of exhaust carts PVIG-100/160-9-018 is based on the principle of gas absorption by sprayed getter and the ability of Penning discharge cell to extract gases. In order to increase gas (including inert gases) extraction speed, the cart combines evaporation and ion units in the common casing.
The exhaust carts are supplied in a moderately cold climate modification category 4 according to GOST 15150. Getter-ion exhaust carts PVIG-100/160-9-018 are powered by special power supply units, not included in the delivery package of the pump.
Exhaust carts PVIG-100/160-9-018 are produced only in one modification of the connecting flange to the pump body: according to GOST 26526 (FG).
Specifications of getter-ion exhaust carts PVIG-100/160-9-018
Parameter |
PVIG-100/160-9-018 |
|
Maximum speed of the ion section in one of the points of the pressure range from 1*10-3 to 1*10-7 Pa, l/sec |
- with nitrogen |
100 |
- with argon |
20 |
|
Maximum speed of the exhaust cart in joint work of ion and evaporation sections with nitrogen in one of the points of the range from 1*10-6 to 1,5*10-8 Pa, l/sec |
250 |
|
Maximum starting pressure of the ion section of the exhaust cart, Pa |
1,0*10-1 |
|
Maximum starting pressure of the evaporating section, Pa |
1,0*10-6 |
|
Maximum working pressure of the ion part, Pa |
1,0*10-3 |
|
Ultimate residual pressure, Pa |
1,5*10-8 |
|
The exhaust cart is powered by a special centralized power supply * |
||
Connecting flange of the pump body according to GOST 26526 (FG) |
- Dn, mm |
100 |
- Pump dimensions (+5 max), mm |
470 х 175 х 350 |
|
* It is allowed to power the ion section of the exhaust cart by BPM-0,25 power supply unit.
Our company Prizma LLC can design and manufacture other vacuum pumps similar to the available equipment, but with different parameters according to the customer’s specifications.