Diode ion vacuum pumps NMD-0,63 and NMDI-0,63
Ion vacuum pumps NMD-0,63 are used for oil-free extraction of gases and gas mixtures (air) from vacuum systems and creation of deep and superdeep vacuum. Ion vacuum pumps NMD-0,63 are used as a part of vacuum processing equipment.
Ion vacuum pumps NMD-0,63 are not intended for extraction of inert gases and continuous pumping of hydrogen (inert gases and hydrogen can be pumped only as impurities in chemically active gases with atomic weight higher than 14). Their capacity is reduced if they are used to pump hydrocarbons. Inert gases can be extracted by ion vacuum pumps NMDI-0,63.
The pumps are supplied in a moderately cold climate modification category 4 according to GOST 15150. Ion pumps are powered by special power supply units (further – BPM), not included in the delivery package of the pump.
Ion vacuum pumps NMD-0,63 are produced in two modifications of the connecting flange to the pump body: according to OST 11 868.007 (FO) and according to GOST 26526 (FG).
NOTE: Power supply units BPM for ion the pumps are supplied by a separate order, together with the pump or separately. Key features of NMD-0,63 and NMDI-0,63 vacuum pumps are shown in the table below. Design and basic dimensions of counter flanges for ion vacuum pumps are shown in the Appendix. Basic specifications of BPM power supply units recommended for our pumps are shown in General specifications of ion vacuum pumps.
Specifications of ion pumps NMD-0,63 and NMDI-0,63
Parameter |
NMD-0,63 |
NMDI-0,63 |
|
Maximum speed, l/sec (± 20 %) |
- with nitrogen |
750 |
600 |
- with argon |
- |
100 |
|
Maximum starting pressure, Pa |
1 |
1 |
|
Maximum working pressure, Pa |
2,0*10-3 |
2,0*10-3 |
|
Ultimate residual pressure, Pa |
4,0*10-8 |
4,0*10-8 |
|
Recommended power supply unit |
BPM-0,25; VAK 1200 |
BPM-0,25; VAK 1200 |
|
Weight (+5 %), kg |
200 |
200 |
|
Connecting flange of the pump body according to OST 11 868.007 (FO) |
- Dn, mm |
250 |
250 |
- Pump dimensions (+5 max), mm |
560 х 410 х 580 |
560 х 410 х 580 |
|
Connecting flange of the pump body according to GOST 26526 (FG) |
- Dn, mm |
250 |
250 |
- Pump dimensions (+5 max), mm |
560 х 380 х 590 |
560 х 380 х 590 |
|
Our company Prizma LLC can design and manufacture other vacuum equipment similar to the available equipment, but with different parameters according to the customer’s specifications.