Turbomolecular vacuum pumps NVT-1000
Turbomolecular vacuum pumps NVT-1000 are used for gases and gas mixtures (air) extraction from vacuum systems (with the exception of hydrocarbons, aggressive gases, vapors that can affect construction materials of the pump) and creation of deep and superdeep vacuum.
- surface physics and gas analysis, manufacturing of electronic devices;
- leak detection, semiconductors production;
- creation of oil-free forevacuum vacuum for electrophysical extraction devices – ion, evaporation (getter) and cryogenic pumps, combined (getter-ion) pumps, exhaust carts, units etc.
The pumps are supplied in a moderately cold climate modification category 4 according to GOST 15150. Turbomolecular ion pumps NVT-1000 require a forevacuum system for their operation. Turbomolecular ion pumps NVT-1000 are powered by special power supply units (further – BPT), not included in the delivery package of the pump.
NOTE: Power supply units BPT for turbomolecular vacuum the pumps are supplied by a separate order, together with the pump or separately. Key features of pumps are shown in the table below. Design and basic dimensions of counter flanges for our turbomolecular vacuum pumps are shown in the Appendix. Basic specifications of BPT power supply units recommended for our pumps are shown in General specifications of turbomolecular vacuum pumps.
Specifications vacuum turbomolecular of NVT-1000 pumps
Parameter |
NVT-1000 FR |
NVT-1000 FO |
NVT-1000 FG |
Pump speeds with air (without inlet protection screen) over the pressure range of 1*10-2 - 1*10-4 Pa, ± 20 %, not less than l/sec |
1000 |
1000 |
1000 |
Ultimate residual pressure of the pump (at discharge pressure not more than 6 Pa), Pa |
1*10-5 |
1*10-6 |
1*10-6 |
Acceleration time, minutes |
15 |
15 |
15 |
Rotational speed, sec-1 |
360±8 |
360±8 |
360±8 |
General levels of vibroacceleration measured in the horizontal plane of the pump inlet flange, in the established mode, not more than, dB |
90 |
90 |
90 |
Cooling |
water-cooled |
water-cooled |
water-cooled |
Grease |
consistent |
consistent |
consistent |
Maximum temperature of the pump inlet flange preheating, °С |
45 |
45 |
45 |
Counter outlet (high-vacuum) flange of the pump, mm |
Mounting flange 250 RD 11 868.006 |
Toothed flange 250 OST 11 868.007 |
Dn-250 flange GOST 26526 |
Counter outlet (forevacuum) flange of the pump, mm |
Flange 40 OST 11 868.005 |
Flange 40 OST 11 868.005 |
Flange 40 OST 11 868.005 |
Pump dimensions, not more than, mm* |
330 х 330 х 280 |
410 х 410 х 280 |
310 х 310 х 300 |
Weight, not more than, kg* |
30 |
39 |
40 |
Recommended power supply unit |
BPT-1000 |
BPT-1000 |
BPT-1000 |
Maximum BPT power consumption, not more than, V*A |
500 |
500 |
500 |
Recommend forevacuum pump |
2NVR-5DM |
2NVR-5DM |
2NVR-5DM |
* dimensions and weight without shipping plugs
Our company Prizma LLC can design and manufacture other vacuum equipment similar to the available equipment, but with different parameters according to the customer’s specifications.